Posted in | Quantum Physics

Lancaster Quantum Technology Centre to Use Etch Tools from Oxford Instruments

Lancaster University based in the UK is populating part of its new world-class Lancaster Quantum Technology Centre (LQTC) with Oxford Instruments' plasma systems as part of its strategy for the development of physical sciences.

PlasmaPro System100 ICP Etch tool

The versatile and proven Oxford Instruments Plasma Technology PlasmaPro NGP80 and PlasmaPro System100 ICP Etch systems were chosen for their flexibility and suitability to enable the many applications that the multi-user LQTC wishes to run in its cleanrooms. With an extensive process library of over 6,000 recipes and its excellent customer support, service and training packages, Oxford Instruments' systems were the ideal choice for the LQTC.

Head of the Semiconductor Physics & Nanostructures Research Group at Lancaster University, Professor Tony Krier, comments, "These new Oxford Instruments etch tools will enable us to run dry plasma etching and nano-patterning on a range of semiconductors including narrow gap antimonides and dilute nitrides for mid-infrared light sources and detectors. They will also be used for development of novel solar cells, quantum dot memories, nano-electronic structures, and much more.

Prof Krier continued, "The new clean room facility provides a focus for industrial and academic researchers with interests in fabricating nanoscale structures to enable them to investigate quantum phenomena. We chose Oxford Instruments because of the excellent technical specification and well founded reputation of the processing tools backed up by expert specialist support."

"Oxford Instruments was founded as a result of the pull-through of science into the marketplace, and we are delighted to be part of this significant development in UK scientific research capabilities", says Mark Vosloo, Sales & Customer Support Director at Oxford Instruments Plasma Technology, "Like the LQTC, Oxford Instruments uses innovation to turn smart science into world class products, meeting the needs of the 21st century and beyond."

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