The NPXY200Z25B is a closed-loop XYZ nanopositioner with 200µm x 200µm x 25µm range of motion and extremely low out-of-plane motion. It has the highest resonant frequency available in the market for products of similar function. It is manufactured from Super Invar. It is designed with an integrated kinematic mounting mechanism to decouple the distortion due to thermal e ects and piezo driving force. This maintains position accuracy at the nanometer level.