The newly designed stages of the series nanoSXY combine the high accuracy and the high speed of piezo positioning system with the a special actuating design for long travel motion. Further more the height of the stage is 20mm only with a free center space of 12.5mm! Outside dimensions are only 60x60mm.
- linear motion up to 400µm in XY
- 12.5mm free clearance aperture
- excellent guidance accuracy
- 5N stiffness in z-axis
- 0.6nm resolution
- 3kHz resonant frequency
Especially the ultra flat design of the stage and the easy way to combine the stage to an xy scanning system makes the system open for a wide variety of applications Based on the unique piezojena bi-directional actuating nanoX design, these series is designed to move high load masses with a resolution of 0.6nm.
The nanoX design also guarantees excellent guidance accuracy without parasitic motion and improves the settling time in an active manner.
The stages can be equipped with a high resolution feed back system for closed loop control.
Fields of application are high resolution metrology, x and xy scanning and dynamic positioning.
The stages are available in a cryogenic and vacuum version as well.