The Annealsys MC100 is a cold wall MOCVD reactor especially developed to meet the requirements of research and development units.
- The Annealsys MC100 is a cold wall MOCVD reactor especially developed to meet the requirements of research and development units.
- The MC100 allows doing heteroepitaxy of oxides on single crystals wafers (such as YBCO/LAO, STO/MgO, MxOy/LAO,…) by MOCVD using a wide
range of solid and liquid organometallic volatile precursors using Direct Liquid Injection technology.
- The MC100 system can be provided with various vaporization systems and vacuum equipment depending on the application.
- Pulse pressure CVD capability