Annealsys MC100 Cold Wall MOCVD Reactor

The Annealsys MC100 is a cold wall MOCVD reactor especially developed to meet the requirements of research and development units.

  • The Annealsys MC100 is a cold wall MOCVD reactor especially developed to meet the requirements of research and development units.
  • The MC100 allows doing heteroepitaxy of oxides on single crystals wafers (such as YBCO/LAO, STO/MgO, MxOy/LAO,…) by MOCVD using a wide
    range of solid and liquid organometallic volatile precursors using Direct Liquid Injection technology.
  • The MC100 system can be provided with various vaporization systems and vacuum equipment depending on the application.
  • Pulse pressure CVD capability

Other Equipment