Physical Vapor Deposition System from Blue Wave Semiconductors

Electro-polished (Ultra High Vacuum compatible) 12” or 18" diameter stainless steel vacuum chamber with multiport compatibility for integrated sputtering and evaporation.

The vacuum chamber consist of several 8”, 6”, 4.5”, 2.7” ports, optical windows, gas leak valves, gate valves. All components made in USA with UHV standard, Heater flange:Fitted with a 2" hot zone Cylindrical flat plate heater capable of working at 900C (up to 10-8 Torr vacuum) in vacuum as well as Oxygen ambient, embedded thermocouple.

Attachment for clip mounting of substrates. X, Y and Z movement of the heater after opening the chamber.

Safety Enclosure on the flange to conceal the heater wires, thermocouple wires. Shutter assembly magnetic coupled. All the above should be mounted on an 8" OD (CF150) flange.

Temperature controller (PID programmable) with SCR firing circuit and multi profile (8 steps).

Blue Wave’s chamber design for UHV compatibility (10-8)Torr useful for metallization of devices in addition to oxides based thin films.

Blue Wave’s system with standard 2426 high end process module for temperature control with precision 1 degree control, computer communication module.

Gas flow assembly for controlling the ambient gas as well as venting the chamber. Includes a flow meter with fine electronic control.Additional mass flow meters for Argon gas to create Ar/O2 pressure for nanoparticle fabrication Electronic based mass flow meters for oxygen with precise control on flow in standard cubic centimeter (sccm) flow. Combination of flow rage and desirable speed of a turbo pump will achieve required process pressure during deposition. Pressure can be varied from 10-6Torr to 0.5Torr. Pfeiffer Gas pressure Monitor and controller: To control the ambient gas automatically in order to keep the pressure constant.

Capable of computer communication and process control through manual or computerized set point through Lab View software.

Clean room grade Steel frame with panel mounted, height adjustable up and down 1-2", Castor wheels, and locks.Gate valve GV- 150: Stainless steel gate valve with CF150 (8" OD) flanges.

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