piezosystem jena´s unique microTRITOR - elements are extremely compact but offer parallel motion without play due to the mechanical design. Despite of the minimal dimensions, motion of up to 9 µm in all three axes is realised. The resolution is in the sub-nm range. microTRITOR - elements can be easily combined with other mechanical or electromagnetic positioning systems - the results are positioning systems with highest resolutions. Due to its design, TRITOR - elements are suitable for dynamic applications.