P-772 nanopositioning stages are the smallest flexure-guided, piezo-driven positioning systems with integrated capacitive sensors currently available. They provide a positioning and scanning range of up to 10 µm, sub-nanometer resolution and ultra-fast response.
Nanometer Precision in Milliseconds
Careful attention to mass minimization, results in significant reduction in inertial recoil forces applied to the supporting structures, enhancing overall system response, throughput and stability with settling times in the millisecond range.
Furthermore our new digital control electronics with DDL (Dynamic Digital Linearization) can be used to increase linearity and effective bandwidth in scanning applications by up to 1000-fold.